Comparison of gas sensor properties by producing ZnO thin films with different techniques

Abstract

ZnO thin films were produced by conventional sol-gel spin coating technique and a novel technique of sol-gel magnetic spin coating. Structural, surface and optical properties of ZnO thin films produced by both techniques were investigated comparatively. The setup and investment costs of the thin film deposition techniques were compared. The use of the produced ZnO thin films as gas sensors has been tested in the gas control and detection system.